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Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)

Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering, Series Number 8)
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Authors: W. N. G. Hitchon
ISBN 10: 0521591759
ISBN 13: 9780521591751
Edition: 1
Published: 1999-01-28
Publisher: Cambridge University Press
Format: Hardcover (232 pages)
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978-0521591751 Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering, Series Number 8)
Cheap Textbook Image ISBN: 0521591759
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Authors: W. N. G. Hitchon
ISBN10: 0521591759 / 0-521-59175-9
ISBN13: 9780521591751 / 978-0-521-59175-1
Edition: 1
Published: 1999-01-28
Publisher: Cambridge University Press
Format: Hardcover (232 pages)
ISBN0521591759
ISBN9780521591751