Extreme Ultraviolet Lithography
Authors: Ajay Kumar - Banqiu Wu
ISBN 10: 0071549188
ISBN 13: 9780071549189
Edition: 1
Published: 2009-04-24
Publisher: McGraw-Hill Education
Format: Hardcover (482 pages)
ISBN 10: 0071549188
ISBN 13: 9780071549189
Edition: 1
Published: 2009-04-24
Publisher: McGraw-Hill Education
Format: Hardcover (482 pages)
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It is likely out-of-print or a custom edition for your school.